E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization StdTpc-Process Chemicals - Bases SEMI D39-0704 (Reapproved 0117)

SEMI D39-0704 (Reapproved 0117)

Recommendations are made based on the cited literature

SEMI E87-0707 (technical revision)

- Common approaches for defining specific elements of equipment metadata

Terms specific to this technology are either listed herein as they relate to the acceptance criteria of this Specification or are defined in the referenced documents as they relate to a specific test method

E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization StdTpc-Process Chemicals - Bases SEMI D39-0704 (Reapproved 0117)1 Purpose 1. 1 This Specification establishes a common basis for communication between users and suppliers of manufacturing equipment in the semiconductor and related industries by providing a standardized methodology for measuring reliability, availability, and maintainability (RAM) and utilization performance of equipment in a manufacturing environment. 2 Scope 2. 1 This Specification defines six mutually exclusive, basic equipment states for all of