E19300 - SEMI E193 - Specification for 300 mm Film Frame FOUP (FFF) volume-C Equipment Communication Standards1 Messages Transfer

Equipment Communication Standards1 Messages Transfer (SECS-I) or the protocol defined in SEMI E37

目的 ―　本仕様は，ベース，ウィンドウ・フレーム，キャップおよび封止ガラス材料を含んだCerquadパッケージ部品用の受諾規準を定義するものである。

Radial resistivity variations are a function of the crystal growth process and dopant

This Document will specify methods

• Consistency check of a recipe with the recipe in Recipe Server just before execution (Pre-Execution Check)

E19300 - SEMI E193 - Specification for 300 mm Film Frame FOUP (FFF) volume-C Equipment Communication Standards1 Messages TransferNOTICE: This Standard does not follow normal formatting rules; it is being published with colored text in Table 1, 10. 4. 1, 10. 4. 1. 2, 10. 4. 1. 3, and Table 2. 1 Purpose 1. 1 The purpose of this Specification is to establish basic physical dimensions for the film frame front opening unified pod (FOUP) which is intended to be used to transport and store 300 mm film frames, as specified by SEMI G74 and within integrated circuit manufacturing