M04000 - SEMI M40 - Guide for Measurement of Roughness of Planar Surfaces on Polished Wafers StdTpc-Flat Panel Display ) or specific instance of

) or specific instance of equipment

and adds Prober Job state model to GEM Standard requirements and capabilities

SEMI E133-0707 (technical revision)

and other methods of measuring electrostatic parameters

These EPDs are

M04000 - SEMI M40 - Guide for Measurement of Roughness of Planar Surfaces on Polished Wafers StdTpc-Flat Panel Display ) or specific instance ofThis Guide incorporates the following methodologies: Standardized scan patterns for both local and full area surface characterization, A set of roughness abbreviations that describe measurement conditions in a short hand code, and Reference test methodologies for three generic types of roughness measuring instruments. These general categories may include, but are not limited to: Profilometers AFM and other scanning probe microscopes; optical