P02000 - SEMI P20 - Guideline for Catalog Publication of EB Resist Parameters (Proposal) StdTpc-Leadframes for which Instrumental Neutron Activation

for which Instrumental Neutron Activation Analysis (INAA) is one method of choice

SEMI C30-0301 (technical revision)

This Specification is for general usage and outlines the basic requirements for open cassettes for 150 mm sapphire wafer sizes

It has been replaced by SEMI F119

Standardization of these component interfaces will allow for interchangeability of gas distribution system components

P02000 - SEMI P20 - Guideline for Catalog Publication of EB Resist Parameters (Proposal) StdTpc-Leadframes for which Instrumental Neutron ActivationThis guideline was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1992. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain