P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate StdPbc-0220 SEMI MF95-1107 (technical revision)

SEMI MF95-1107 (technical revision)

SEMI E87-0301 (technical revision)

This Guide can be used as a guide by semiconductor manufacturers and cleanroom facilities designers during the design of their facilities

production equipment including process and metrology equipment

本スタンダードは，Gases Global Technical Committeeで技術的に承認されている。現版は2011年12月24日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年4月にwww

P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate StdPbc-0220 SEMI MF95-1107 (technical revision)This checklist was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1996. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain