G05300 - SEMI G53 - Specification for Metal Lid/Preform Assembly StdTpc-Stainless Steel Components Predict the microstructure and mechanical

Predict the microstructure and mechanical properties of steel

SEMI T3-0697E (editorial revision)

org August 2000

·        プロセスカセットまたはクォーツボートとプロセスチェンバーの底面との間

本仕様ではキャリアIDリーダあるいはリーダ／ライタが送信する非同期メッセージを要求，定義，あるいは禁止しない。

G05300 - SEMI G53 - Specification for Metal Lid/Preform Assembly StdTpc-Stainless Steel Components Predict the microstructure and mechanicalThis specification provides guidelines for the design and acceptance of metal lid preform assemblies. This specification may be used by suppliers at outgoing inspection and by the customers at incoming inspection. The design and acceptance criteria may be used for metal lid preform assemblies used on all types of semiconductor packages. Improper lid preform design and poorly specified lid preforms contributes to low sealing yields and unreliable